暂无记录
首页MEMS单晶硅片
MEMS单晶硅片

MEMS单晶硅片

经销世界知名品牌MEMS单晶硅片产品。MEMS单晶硅片生长方式,等级,直径,厚度,表面处理,晶向,晶向偏角,掺杂类型,电阻率,薄膜,加工服务。

产品详情

Czochralski

Float Zone

Float Zone

Diameter

100-150 mm

50-150 mm*

100-150 mm*

Crystal orientation

<100> <111>

<100> <111>

<100> <111>

Orientation accuracy

<0.5°

<0.5°

<0.5°

Type and dopant

Undoped, n-type,
p-type

Undoped, n-type,
p-type

Undoped, n-type,
p-type

Dopant

As, B, P, and Sb

P, B

P, B

Bulk resistivity

0.001-60

1-30,000

1-30,000

Bulk lifetime

>20 µs

>1,000 µs

>1,000 µs

Wafer thickness

200-1,500 µm

200-1,500 µm

200-1,500 µm

Wafer thickness
tolerance

±15 µm

±15 µm

±5 µm

TTV

<5 µm or <9 µm

<5 µm or <9 µm

<2.5 µm

TIR

<3 µm

<3 µm

<1 µm

Wafer surface finish

Single side polished,
Double side polished

Single side
polished

Double side
polished


下载资料
Baidu
map