| Diameter |
2" |
3" |
4" |
5" |
6" |
8" |
12" |
| Grade |
Prime |
| Growth Method |
CZ |
| Orientation |
< 1-0-0 > , < 1-1-1 > , < 1-1-0 > |
| Type/Dopant |
P Type/Boron , N Type/Phos, N Type/As, N Type/Sb |
| Thickness (μm) |
279 |
380 |
525 |
625 |
675 |
725 |
775 |
| Thickness Tolerance |
Standard ± 25μm, Maximum Capabilities ± 5μm |
± 20μm |
± 20μm |
| Resistivity |
0.001 - 100 ohm-cm |
| Surface Finished |
P/E , P/P, E/E, G/G |
| TTV (μm) |
Standard < 10 um, Maximum Capabilities <5 um |
| Bow/Warp (?m) |
Standard <40 um, Maximum Capabilities <20 um |
<40μm |
<40μm |
| Particle |
<10@0.5um; <10@0.3um; <10@0.2um; |
扫描二维码 关注微信
